Design and comprehensive analysis of a novel structure of ARCL-to-SCL GSG transition for millimeter wave applications

A comprehensive study of air core recta-coax line (ARCL) based on MEMS surface micromachining technology is presented in this paper. The ARCL-to-semi-rectangular coaxial transmission (SCL) ground-signal-ground (GSG) transition proposed and designed for probe testing integration with MMIC chips. To obtain the characteristic impedance SCL, an equivalent model theoretical derivation process presented. In order to consider effects processing performance, electrical dielectric support strap parameters potential fabrication issues including offset layers over etching are investigated. For verification, back-to-back GSG fabricated measured which has a low insertion loss 0.13dB up 50GHz, return better than -23dB within 5-50GHz. As example, demonstration ARCL chips demonstrated.